A self-test and dynamics characterization circuit for MEMS electrostatic actuators
نویسندگان
چکیده
This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and low-cost actuator dynamics characterization system capable of measuring both periodic and non-
منابع مشابه
Pulse-drive and Capacitive Measurement Circuit for Mems Electrostatic Actuators
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating a signal that is a function of the input voltage and capacitive ratio. The propose...
متن کاملPulse-Drive and Capacitance Measurement Circuit for MEMS Electrostatic Actuators
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating a signal that is a function of the input voltage and capacitive ratio. The propose...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کاملStability Analysis in Parametrically Excited Electrostatic Torsional Micro-actuators
This paper addresses the static and dynamic stabilities of a parametrically excited torsional micro-actuator. The system is composed of a rectangular micro-mirror symmetrically suspended between two electrodes and acted upon by a steady (dc ) while simultaneously superimposed to an (ac ) voltage. First, the stability of the system subjected to a quasi-statically applied (dc ) voltage is investi...
متن کاملRobust Control of an Electrostatic Microelectromechanical Actuator
A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors ... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent po...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 51 شماره
صفحات -
تاریخ انتشار 2011